詞語:scatterometry
scatterometry的意思
scatterometry 散射測量;
scatterometry的參考例句
1.The overlay can be found by the zero order diffractive efficiency. This method, scatterometry, has the advantages of being noncontact and nondestructive, and an accuracy of nanometer. 光柵疊對誤差可利用零級繞射效率變化來求得,此方法為非接觸式和非破壞性量測,並可量測疊對誤差至奈米等級。