詞語：step-scan
step-scan的意思
step-scan 步進掃瞄;
step-scan的參考例句
1.A novel in-situ non-flatness measurement method of wafer stage mirrors in a step-and scan lithographic tool is presented. 提出一種新的步進掃瞄投影光刻機工件台方鏡不平度測量方法。
2.This algorithm was suitable for diversified precision trimming needs because the smallest scan step-length could be adapted to control precision of surface trimming. 由於可以通過定義掃瞄移動最小步距值來控制曲面裁剪操作的精度，該算法適用於各種精度需求的裁剪操作場合。
3.In order to meet the requirements of high resolution and alignment accuracy, the lithography equipments have been advanced from step-and-repeat system to step-and-scan system. 中文摘要覆蓋誤差精度是影響積體電路製造微影技術的關鍵準則之一，為了提高對準精度與解析度，現有曝光機台技術已由步進式曝光機改良為掃瞄式曝光機。